||Quartz Glass Characteristics
Quartz glass is a highly functional material with unlimited possibilities.
Quartz glass is a material with a combination of superior characteristics. These include (1) high purity, (2) superior heat resistance, (3) superior light transmittance, and more.
Quartz glass has an extremely high purity. In the semiconductor production process, where ever higher integration occurs, even the smallest microscopic impurities are unwanted. Thus, for the quartz glass used in reaction chambers and other parts of the production process, the requirements for purity are extremely strict.
Shin-Etsu Quartz Products Co., Ltd. has consistently pursued the development of products of even higher purity. As well as its high-purity transparent quartz glass from which all alkali metallic impurities have been removed, the Company has also developed an ultra-pure synthetic quartz glass for application in next-generation devices.
Quartz glass has a combination of superior heat-resistance properties with an extremely low heat expansion coefficient. In the high-temperature processes employed in the manufacture of semiconductors, including the heat treatment process, quartz glass is widely used, as a material with high heat-resistant shape stability characteristics, for furnace tubes, boats, and so on.
Compared with ordinary glass types, transparent quartz glass has light-transmittance characteristics that are extremely high over all wavelengths, from ultraviolet to infrared. Thus this quartz glass is used as lens material for exposure devices, for optical fiber, and as a material for lamps.
Especially in the low-wavelength ultraviolet ranges, quartz glass shows superior transmittance characteristics not achieved with any other type of glass.
Shin-Etsu Quartz Products Co., Ltd. in Visual Images (1)
The company introduction video presents an easy-to-understand explanation about the differences between quartz glass and ordinary glass. (Viewing time: 1:15 min.)